Microsystems Technologies
NE2103.MST
P213-0140
nem
3
V
1
U
4
1
yes
English
Written exam
NE2103.MST
Neural Engineering
1
mandatory course
60 class hours (= 45 clock hours) over a 15-week period.The total student study time is 120 hours (equivalent to 4 ECTS credits).There are therefore 75 hours available for class preparation and follow-up work and exam preparation.
Prof. Dr. Wenmin Qu
wqu
Prof. Dr. Wenmin Qu
wqu
Students should have a good understanding of commonly used technologies in microsystems engineering; especially, they should have a good command of the functional principles and associated manufacturing procedures of typical micro components; they can designate the advantages and limitations of the different micro manufacturing techniques and can select suitable solutions for practical applications
1. Introduction: markets and applications of Microsystems Technology
2. Overview of microfabrication techonologies
2.1 Lithography
2.2 Thin-film techniques
2.3 Bulk- and surface micromachining
2.4 LIGA technology
3. Main micro fabrication processes
3.1 Materials of microsystems
3.2 Cleanroom technology and behavior in cleanrooms
3.3 Lithography
3.4 Thin-film process (CVD, PVD; Oxidation)
3.5 Doping
3.6 Etching
3.7 Bonding and Packaging
4. Applications:
4.1 Micro sensors
4.1.1 Temperature sensor
4.1.1 Pressure sensor
4.1.2 Acceleration sensor
4.1.3 Rotation rate sensor
4.1.4 Glucose sensor
4.2 Micro Actuators
4.2.1 Micro channels for mixing purpose
4.2.2 Inkjet printhead
4.2.3 Mirror chips
Lectures using PowerPoint presentations incl. video sequences, especially for selected manufacturing processes and components.
Boussey, Jumana: Microsystems Technology: Fabrication, Test and Reliability, Kogan Page Science, 2003, ISBN 978-1903996478
Francis, Laurent A.; Iniewski, Krzysztof: Novel Advances in Microsystems Technologies and Their Applications, CRC Press, 2017, Reprint, ISBN 978-1138072794
Madou, Marc J.: Fundamentals of Microfabrication, CRC Press, 1997, ISBN 0-8493-9451-1
Menz, Wolfgang; Mohr, Jürgen; Paul, Oliver: Microsystem Technology, Wiley-VCH, 2001, ISBN 978-3527296347
Fri Mar 29 09:27:12 CET 2024, CKEY=nemNE2103.MST, BKEY=nem, CID=[?], LANGUAGE=en, DATE=29.03.2024